3D integration techniques applied to SiGe power amplifiersRamana MalladiAlvin Josephet al.2008ECS Meeting 2008
Recent progress and challenges in enabling embedded Si:C technologyB. YangZ. Renet al.2008ECS Meeting 2008
Effect of ion implantation and anneals on fully-strained SiC and SiC:P films using multiple characterization techniquesA. MadanJ. Liet al.2008ECS Meeting 2008
Strain loss in epitaxial Si: C films induced by phosphorus diffusionB.F. YangJ.P. De. Souzabet al.2008ECS Meeting 2008
Channel Strain Characterization in Embedded SiGe by Nano-beam DiffractionJ. LiA. Lambertiet al.2008ECS Meeting 2008