Vertical Profile Optimization of Very High Frequency Epitaxial Si- and SiGe-Base Bipolar TransistorsE.F. CrabbéB.S. Meyersonet al.1993IEDM 1993
A DUAL DAMASCENE HARD METAL CAPPED CU AND AL-ALLOY FOR INTERCONNECT WIRING OF ULSI CIRCUITSH. DalaiR.V. Joshiet al.1993IEDM 1993