Erbium-doped silicon prepared by UHV/CVD
- D.B. Beach
- R.T. Collins
- et al.
- 1992
- MRS Proceedings 1992
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12 results at MRS Proceedings 1992
Deposition rate monitoring using laser induced fluorescence
- T.C. Reiley
- E.E. Marinero
- et al.
- 1992
- MRS Proceedings 1992