Acid-catalyzed dehydration for the design of chemical amplification resists
- Hiroshi Ito
- R. Sooriyakumaran
- et al.
- 1991
- ACS Spring 1991
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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16 results at ACS Spring 1991
Fluorescence spectroscopy and photochemistry of poly(4-tert-butoxycarbonyloxystyrene) triphenylsulfonium salt mixtures
- Nigel P. Hacker
- Kevin M. Welsh
- 1991
- ACS Spring 1991
Advances in organic resist materials
- C.G. Willson
- 1991
- ACS Spring 1991
Progress in unzipping polyaldehyde resist systems
- Hiroshi Ito
- 1991
- ACS Spring 1991
Lithography
- A.D. Wilson
- 1991
- ACS Spring 1991
Polymeric nonlinear optoelectronic materials, challenges and opportunities
- R. Tweig
- G.C. Bjorklund
- et al.
- 1991
- ACS Spring 1991