A method to improve setup and overlay performance on an excimer laser stepper using a unique DUV resist-KRS
- Karen Petrillo
- James Brancaccio
- et al.
- 1997
- Microlithography 1997
Publications
3593 results for Mathematical Sciences
Evaluation of the defense advanced lithography program (DALP) X-ray lithography aligner
- A.C. Chen
- A. Flamholz
- et al.
- 1997
- Microlithography 1997
Conducting polyaniline coatings for submicron lithography and SEM metrology
- Teresita Graham
- Marie Angelopoulos
- et al.
- 1997
- Microlithography 1997
Simulation of X-ray mask defect printability
- B.S. Bollepalli
- Scott D. Hector
- et al.
- 1997
- Microlithography 1997
Estimation methods for stochastic Petri nets based on standardized time series
- P.J. Haas
- 1997
- PNPM 1997
Hybrid pyramidal/vector-quantized volume compression
- Ranjit Desai
- Jai Menon
- 1997
- IS&T/SPIE Electronic Imaging 1997
A linear-time algorithm for computing the intersection of all odd cycles in a graph
- Leizhen Cai
- Baruch Schieber
- 1997
- Discrete Applied Mathematics
Excimer laser ablation of polyimide: A 14-year IBM perspective
- James H. Brannon
- Thomas A. Wassick
- 1997
- SPIE Photonics West 1997
A simple p-adaptive refinement procedure for structural shape optimization
- Raviprakash R. Salagame
- Ashok D. Belegundu
- 1997
- Finite Elements in Analysis and Design
Can invisible watermarks resolve rightful ownerships?
- Scott Craver
- Nasir Memon
- et al.
- 1997
- IS&T/SPIE Electronic Imaging 1997