Equilibrium Carrier Density and Solubility of Antimony in Silicon
- D. Nobili
- R. Angelucci
- et al.
- 2019
- JES
Publications
509 results at JES
The effect of organometallic structure
- Thomas H. Baum
- 2019
- JES
Phosphorus-Doped Polycrystalline Silicon via LPCVD: II. Surface Interactions of the Silane/Phosphine/Silicon System
- B.S. Meyerson
- M.L. Yu
- 2019
- JES
Chemical vapor deposition of gold
- Carl E. Larson
- Thomas H. Baum
- et al.
- 2019
- JES
Reactive Ion Etching of Silicon Nitride Deposited by Different Methods in CF4/H2 Plasmas
- W.A. Lanford
- 2019
- JES
Acceleration Factors for the Decomposition of Thermally Grown SiO2 Films
- S.I. Raider
- 2019
- JES
Electro-Oxidation of substituted silane high polymers
- A. Diaz
- R.D. Miller
- 2019
- JES
Near-Surface Damage and Contamination after CF4/H2 Reactive Ion Etching of Si
- G.S. Oehrlein
- R.M. Tromp
- et al.
- 2019
- JES
Process Damage and Contamination Effects for Shallow Si Implanted GaAs
- H. Baratte
- A.J. Fleischman
- et al.
- 2019
- JES
Laser-Enhanced Electrodeposition of Lead-Tin Solder
- M. Datta
- L.T. Romankiw
- 2019
- JES