Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: I. Very Low Pressure Deposition
- James H. Comfort
- Rafael Reif
- 2019
- JES
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The Ion Sensitivity of Boron Implanted Silicon Nitride Chemical Sensors
- Yin Hu
- Marvin H. White
- 2019
- JES
Hollow Cathode Etching of Si and SiO2 Using CF4 and H2
- G. Fortuño-Wiltshire
- G.S. Oehrlein
- 2019
- JES
Jet and Laser-Jet Electrochemical Micromachining of Nickel and Steel
- M. Datta
- L. Romankiw
- et al.
- 2019
- JES
Elimination of End-of-Range Shallow Junction Implantation Damage during CMOS Titanium Silicidation
- G.A. Rozgonyi
- 2019
- JES
The Mechanism of Electroless Cu Deposition: Extraction of the Oxidative and Reductive Electrochemical Half-Cell Currents from a Complete Bath
- O.R. Melroy
- 2019
- JES
Laser-Assisted Etching of Manganese-Zinc-Ferrite
- Brian W. Hussey
- Arunava Gupta
- et al.
- 2019
- JES
Pitting of Sputtered Aluminum Alloy Thin Films
- G.S. Frankel
- Michael A. Russak
- et al.
- 2019
- JES
Vapor Phase Deposition of Palladium for Electroless Copper Plating
- Richard R. Thomas
- Jae M. Park
- 2019
- JES
Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: II. Plasma Enhanced Deposition
- James H. Comfort
- Rafael Reif
- 2019
- JES