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Removal of Fluorocarbon Residues on CF4/H2 Reactive-ion-Etched Silicon Surfaces Using a Hydrogen PlasmaJ. SimkoG.S. Oehrleinet al.2019JES
Epitaxial Growth of GaAs with (C2H5)2GaCl and AsH3 in a Hotwall ReactorT.F. KuechM.A. Tischleret al.2019JES
Constriction-Induced Local Electrodeposition The Principle of Self-Induced RepairC. Julian Chen2019JES
Epitaxial Growth and Selectivity of AlxGa1-xAs Using Novel Metalorganic PrecursorsM.S. GoorskyT.F. Kuechet al.2019JES
Combined Experimental and Modeling Study of Spatial Effects in Plasma Etching: CF4/O2 Etching of SiliconM. DalvieK.F. Jensen2019JES
Comparative Study of Phosphorescence and Photostimulated Luminescence in Zinc Silicate Phosphors and Their Description by a Tunneling ModelP. ThioulouseI.F. Changet al.2019JES