Growth "kinetics" and growth mechanisms for disilicide layers obtained through implantation
- F.M. D'Heurle
- C.S. Petersson
- et al.
- 1982
- Journal of Applied Physics
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.