Etch Selectivity of Silicon Dioxide over Titanium Silicide Using CF4/H2 Reactive Ion Etching
- Steve W. Robey
- Gottlieb S. Oehrlein
- 2019
- JES
Publications
509 results at JES
Electrical Conduction in Surfactant-Water-Nonaqueous Liquid Systems
- V. Novotny
- 2019
- JES
Dependence of the Flatband Voltage of Si-MOS on Distribution of Cesium in SiO2 Comparison of Two Implantation Methods
- L. Krusin-Elbaum
- 2019
- JES
Measurement of Thin-Film Dissolution Kinetics using a Quartz Crystal Microbalance
- W.D. Hinsberg
- C.G. Willson
- et al.
- 2019
- JES
PtSi-Induced Junction Leakage
- J.P. Gambino
- M.D. Monkowski
- et al.
- 2019
- JES
Silicon Oxidation Studies: Silicon Orientation Effects on Thermal Oxidation
- E. Tierney
- 2019
- JES
PtSi Contact Metallurgy using Sputtered Pt and Different Annealing Processes
- H.-C.W. Huang
- B. Cunningham
- et al.
- 2019
- JES
The Polycrystalline-Si Contact to GaAs
- P.D. Kirchner
- J.M. Woodall
- et al.
- 2019
- JES
Investigation of Reactive-Ion-Etching-Related Fluorocarbon Film Deposition onto Silicon and a New Method for Surface Residue Removal
- G.S. Oehrlein
- J.G. Clabes
- et al.
- 2019
- JES
Electrolyte Effects on the Switching Reaction of Polyaniline
- Jean-Christophe LaCroix
- A. Diaz
- 2019
- JES