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Energy Considerations in the Deposition of High-Quality Plasma-Enhanced CVD Silicon DioxideE. TierneyJ. Bateyet al.2019JES
Computer Simulation of Oxygen Segregation in CZ/MCZ Silicon Crystals and Comparison with Experimental ResultsW.E. Langlois2019JES
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Approaches to the Design of Radiation-Sensitive Polymeric Imaging Systems with Improved Sensitivity and ResolutionJean M.J. FréchetTheodore G. Tessieret al.2019JES
Electrical Properties of Chemical-Mechanical Polished Tetraethyl Orthosilicate Films with and Without Capping LayersS. CohenM.A. Jasoet al.2019JES