Excimer laser as a source for thin Cu film deposition for use in electronic device fabrication
- A. Sugerman
- Bodil Braren
- et al.
- 1993
- SPIE OE/LASE 1993
Publications
3593 results for Mathematical Sciences
Raman properties stoichiometry and the hardness of hydrogenated amorphous carbon
- M. Krantz
- D.D. Saperstein
- et al.
- 1992
- SPIE OE/LASE 1992
Research queueing package modeling environment (RESQME)
- Kow C. Chang
- Robert F. Gordon
- et al.
- 1992
- WSC 1992
Modified Metropolis annealing algorithm for QM-AYA arithmetic Coder design optimization
- Joe-Ming Cheng
- Glen G. Langdon
- 1993
- SPIE Applications of Digital Image Processing 1993
Arrayed lithography using STM-based microcolumns
- T. H. Philip Chang
- Lawrence P. Muray
- et al.
- 1993
- SPIE Advanced Optical Technologies 1993
Principles and techniques of STM lithography
- Mark A. McCord
- Roger Fabian W. Pease
- 1993
- SPIE Advanced Optical Technologies 1993
Atomic force microscopy experimentation at surfaces: Hardness, wear and lithographic applications
- T.A. Jung
- A. Moser
- et al.
- 1993
- SPIE Advanced Optical Technologies 1993
Subharmonic self-locking of a Josephson soliton oscillator coupled to a resonator
- J. Holm
- Paola Barbara
- et al.
- 1993
- Physica D: Nonlinear Phenomena
The influence of residual casting solvent on the dissolution behavior of diazonaphthoquinone resists
- V. Rao
- W.D. Hinsberg
- et al.
- 1993
- Microlithography 1993
Acid-catalyzed single-layer resists for ArF lithography
- Roderick R. Kunz
- Robert D. Allen
- et al.
- 1993
- Microlithography 1993