High-rate reactive sputter deposition of aluminum oxide
- Fletcher Jones
- Joseph Logan
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Gas/surface reactions in the chemical vapor deposition of tungsten using WF6/SiH4mixtures
- Ming L. Yu
- Benjamin N. Eldridge
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Scanning tunneling microscopy study of low-temperature epitaxial growth of silicon on sI(111 )-(7×7)
- U.K. Köhler
- J.E. Demuth
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Gas density reduction effects in magnetrons
- S.M. Rossnagel
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Molecular-beam studies of dissociative chemisorption of O2on Pt(111)
- M.D. Williams
- D.S. Bethune
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Coevaporation of Cr-Cu and Mo-Ag
- J. Kim
- S.H. Wen
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Relative elemental sensitivity factors in secondary neutral mass spectrometry
- A. Wucher
- F. Novak
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Metal-polymer chemistry. I. Charge-transfer-related modifications of polyimide (pyromellitic dianhydride-4,4'-oxydianiline)
- J.G. Clabes
- M.J. Goldberg
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Pthalimide on copper: A model system to address certain site-specific interactions at the polyimide-copper interface
- W.R. Salaneck
- S. Stafstrom
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Mechanisms of contaminant particle production, migration, and adhesion
- R.J. Miller
- Douglas W. Cooper
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films