Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Competitive reactions of fluorine and oxygen with W, WSi2, and Si surfaces in reactive ion etching using CF4/O2
- - Gottlieb S. Oehrlein
  - J. Lennart Lindsöm
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface analysis of realistic semiconductor microstructures
- - Gottlieb S. Oehrlein
  - Kevin K. Chan
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A comparison between aluminum and copper interactions with high-temperature oxide and nitride diffusion barriers
- - A. Charai
  - S.E. Harnstram
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Multilayer thin films for x-ray optics
- - Eberhard Spiller
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Transient fluorocarbon film thickness effects near the silicon dioxide/silicon interface in selective silicon dioxide reactive ion etching
- - Mark A. Jaso
  - Gottlieb S. Oehrlein
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A time resolved study of velocity distributions in pulsed molecular beams
- - Benjamin N. Eldridge
  - Ming L. Yu
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
X-ray photoemission spectroscopy characterization of silicon surfaces after CF₄/H₂magnetron ion etching: Comparisons to reactive ion etching
- - Gottlieb S. Oehrlein
  - Arthur A. Bright
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Characterization of the surface oxidation and magnetic properties of MnFe thin films
- - S.L. Cohen
  - Michael A. Russak
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Voltage-dependent scanning tunneling microscopy imaging of semiconductor surfaces
- - Joseph A. Stroscio
  - D.M. Newns
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A scanning tunneling microscopy study of the reaction of si(001)-(2 x 1) with nh₃
- - R.J. Hamers
  - Ph. Avouris
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films