Publications

3541 results for Mathematical Sciences

Condenser aberrations in Köhler illumination
- - Douglas S. Goodman
  - Alan E. Rosenbluth
- 1989
- Proceedings of SPIE 1989
Gel resist processing for submicron CMOS and bipolar circuits
- - K.E. Petrillo
  - M. Smyth
  - et al.
- 1989
- Proceedings of SPIE 1989
Chemical and physical aspects of multilayer resist processing
- - J. Paraszczak
  - E. Babich
  - et al.
- 1989
- Proceedings of SPIE 1989
Bench evaluation of lithographic lenses from measurements of the point spread function
- - Norman Bobroff
  - Petra Fadi
  - et al.
- 1989
- Proceedings of SPIE 1989
Sub-picosecond raman spectroscopy of semiconductors
- - J.C. Tsang
  - J.A. Kash
- 1989
- Proceedings of SPIE 1989
Novolac based deep-uv resists
- - Dennis R. McKean
  - Scott A. Macdonald
  - et al.
- 1989
- Proceedings of SPIE 1989
Aqueous base developable deep uv resist systems based on novel monomeric and polymeric dissolution inhibitors
- - Hiroshi Ito
- 1989
- Proceedings of SPIE 1989
Chromium mask damage in excimer laser projection processing
- - J.T.C. Yeh
- 1989
- Proceedings of SPIE 1989
Two-regime ablative hole formation process in tellurium and tellurium-alloy films
- - M. Chen
  - V. Marrello
  - et al.
- 1989
- Proceedings of SPIE 1989
Aqueous developable, negative working resist made of chlorinated novolac resin
- - H. Hiraoka
  - A.M. Patlach
  - et al.
- 1989
- Proceedings of SPIE 1989