Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Tungsten-rhenium alloys as diffusion barriers between aluminum and silicon
- - S.-E. Hörnström
  - T. Lin
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Phenomena produced by ion bombardment in plasma-assisted etching environments
- - Harold F. Winters
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Low-energy neutral/ion backscattering at As/Si(001)
- - H. Niehus
  - K. Mann
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Polyimide-copper interfaces: Growth sequence dependence and solvent effects
- - Steven P. Kowalczyk
  - Young H. Kim
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Calculation of postionization probabilities as a function of plasma parameters in electron gas secondary neutral mass spectrometry
- - A. Wucher
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Microstructure of sputtered metal films grown in high and low pressure discharges
- - E. Kay
  - F. Parmigiani
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: The barrier to oxygen penetration on transition-metal oxide surfaces
- - Peter Nordlander
  - Maria Ronay
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Imaging oxygen acceptor states on the GaAs(110) surface
- - Joseph A. Stroscio
  - R.M. Feenstra
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Atomic force microscopy studies of frictional forces and of force effects in scanning tunneling microscopy
- - C. Mathew Mate
  - Ragnar Erlandsson
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Promotion of dissociative chemisorption with vibrational and translational energy
- - C.T. Rettner
  - H.E. Pfnür
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films