Publications

93 results at MRS Proceedings

Resist requirements and limitations for nanoscale electron-beam patterning
- - J. Alexander Liddle
  - Gregg M. Gallatin
  - et al.
- 2002
- MRS Proceedings 2002
Ion projection direct-structuring for nanotechnology applications
- - Hans Loeschner
  - Ernest J. Fantner
  - et al.
- 2002
- MRS Proceedings 2002
Silicon self-interstitial cluster formation and dissolution in SOI
- - A.F. Saavedra
  - J. Frazer
  - et al.
- 2002
- MRS Proceedings 2002
Characterization and monitoring of silicon-on-insulator fabrication processes by high-resolution x-ray diffraction
- - G.M. Cohen
  - P.M. Mooney
  - et al.
- 2002
- MRS Proceedings 2002
Crystallographic texture and phase metrology during damascene copper processing
- - K.J. Kozaczek
  - P. DeHaven
  - et al.
- 2002
- MRS Proceedings 2002
A self-aligned silicide process utilizing ion implants for reduced silicon consumption and control of the silicide formation temperature
- - G.M. Cohen
  - C. Cabral Jr.
  - et al.
- 2002
- MRS Proceedings 2002
Terabit density cobalt nanowire arrays with tunable magnetic properties
- - Andrei Ursache
  - Mustafa Bal
  - et al.
- 2002
- MRS Proceedings 2002
Cu and dilute binary Cu(Ti), Cu(Sn) and Cu(Al) thin films: Texture, grain growth and resistivity
- - A. Gungor
  - K. Barmak
  - et al.
- 2002
- MRS Proceedings 2002
Texture and resistivity of Cu and dilute Cu alloy films
- - K. Barmak
  - A. Gungor
  - et al.
- 2002
- MRS Proceedings 2002
The growth of tantalum thin films by plasma-enhanced atomic layer deposition and diffusion barrier properties
- - H. Kim
  - C. Cabral Jr.
  - et al.
- 2002
- MRS Proceedings 2002