Optical nanolithography using evanescent fields
- Richard J. Blaikie
- Sharee J. McNab
- et al.
- 2002
- MRS Proceedings 2002
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Ion projection direct-structuring for nanotechnology applications
- Hans Loeschner
- Ernest J. Fantner
- et al.
- 2002
- MRS Proceedings 2002
Characterization and monitoring of silicon-on-insulator fabrication processes by high-resolution x-ray diffraction
- G.M. Cohen
- P.M. Mooney
- et al.
- 2002
- MRS Proceedings 2002
Silicon self-interstitial cluster formation and dissolution in SOI
- A.F. Saavedra
- J. Frazer
- et al.
- 2002
- MRS Proceedings 2002
Terabit density cobalt nanowire arrays with tunable magnetic properties
- Andrei Ursache
- Mustafa Bal
- et al.
- 2002
- MRS Proceedings 2002
The growth of tantalum thin films by plasma-enhanced atomic layer deposition and diffusion barrier properties
- H. Kim
- C. Cabral Jr.
- et al.
- 2002
- MRS Proceedings 2002
Pyrene fluorescence as a molecular probe of miscibility in organic/inorganic hybrid nanocomposites suitable for microelectronic applications
- Q.R. Huang
- David Mecerreyes
- et al.
- 2002
- MRS Proceedings 2002
Low temperature metal organic chemical vapor deposition of aluminum oxide thin films for advanced CMOS gate dielectric applications
- Spyridon Skordas
- Filippos Papadatos
- et al.
- 2002
- MRS Proceedings 2002
Crystallographic texture and phase metrology during damascene copper processing
- K.J. Kozaczek
- P. DeHaven
- et al.
- 2002
- MRS Proceedings 2002
A self-aligned silicide process utilizing ion implants for reduced silicon consumption and control of the silicide formation temperature
- G.M. Cohen
- C. Cabral Jr.
- et al.
- 2002
- MRS Proceedings 2002