Energy deposition functions in electron resist films on substrates
- Mihir Parikh
- David F. Kyser
- 2008
- Journal of Applied Physics
Publications
2360 results at Journal of Applied Physics
XPS and Mössbauer studies of amorphous FeGe
- Peter Terzieff
- Kenneth Lee
- et al.
- 2008
- Journal of Applied Physics
Ion- and electron-assisted gas-surface chemistry - An important effect in plasma etching
- J.W. Coburn
- Harold F. Winters
- 2008
- Journal of Applied Physics
Ion-beam-induced metastable Pt2Si3 phase. II. Kinetics and morphology
- B.Y. Tsaur
- J.W. Mayer
- et al.
- 2008
- Journal of Applied Physics
Corrections to proximity effects in electron beam lithography. II. Implementation
- Mihir Parikh
- 2008
- Journal of Applied Physics
Corrections to proximity effects in electron beam lithograhy. III. Experiments
- Mihir Parikh
- 2008
- Journal of Applied Physics
Amorphous GdNdFe bubble films with good temperature characteristics
- Neil Heiman
- N. Kazama
- et al.
- 2008
- Journal of Applied Physics
Numerical evaluation of Lindhard's theory of stopping power for a charged particle in a free-electron gas
- G.J. Iafrate
- J.F. Ziegler
- 2008
- Journal of Applied Physics
Oxide growth in an rf plasma
- A.T. Fromhold Jr.
- John M. Baker
- 2008
- Journal of Applied Physics
Structural characterization of sputtered hydrogenated amorphous carbon films by solid state nuclear magnetic resonance
- Gyunggoo Cho
- Bing K. Yen
- et al.
- 2008
- Journal of Applied Physics