Impact of high-NA half-field to full-field overlay performance by Monte Carlo simulations
- Romain Lallement
- Daniel Schmidt
- et al.
- 2023
- OEN 2023
Publications
14329 results for Physical Sciences
TSV Stress Evolution Mapping using in-line Raman Spectroscopy
- Stefan Schoeche
- Daniel Schmidt
- et al.
- 2023
- SPIE Advanced Lithography + Patterning 2023
BF2-Azadipyrromethene Fluorophores for Intraoperative Vital Structure Identification
- Cathal Caulfield
- Dan Wu
- et al.
- 2023
- Molecules
Low-energy electron microscopy contrast of stacking boundaries: Comparing twisted few-layer graphene and strained epitaxial graphene on silicon carbide
- Tobias A. De Jong
- Xingchen Chen
- et al.
- 2023
- Physical Review B
Electron transmission and mean free path in molybdenum disulfide at electron-volt energies
- Peter S. Neu
- Makars Šiškins
- et al.
- 2023
- Physical Review B
Automating and Accelerating Scientific Discovery – Continuous and Discontinuous Experimentation Setups for Polymer Research and High-Quality Dataset Generation
- 2023
- MaRDA 2023
A multi-timescale synaptic weight based on ferroelectric hafnium zirconium oxide
- Mattia Halter
- Laura Bégon-Lours
- et al.
- 2023
- Communications Materials
Selective electrodeposition of indium microstructures on silicon and their conversion into InAs and InSb semiconductors
- Katarzyna E. Hnida-Gut
- Marilyne Sousa
- et al.
- 2023
- Discover Nano
A coupled Variational Encoder-Decoder - DeepONet surrogate model for the Rayleigh-Bénard convection problem
- Joao Lucas de Sousa Almeida
- Pedro Rocha
- et al.
- 2023
- AAAI 2023
From Ferroelectric Material Optimization to Neuromorphic Devices
- Thomas Mikolajick
- Min Hyuk Park
- et al.
- 2023
- Advanced Materials