Commercialization of Non-PFAS KrF and Development of Non-PFAS EUV Photoresists
- Cong Liu
- Joseph Lachowski
- et al.
- 2025
- SPIE Advanced Lithography 2025
Publications
24822 results for Exploratory Science
The Impact of Polymer Compositional Homogeneity on Lithography and Defects
- Benjamin D. Rafael-Naab
- Jong Keun Park
- et al.
- 2025
- SPIE Advanced Lithography 2025
Effect of Composition Uniformity in the Polymer Chain of EUV Photoresist on Lithographic Performance
- EuiJin Ko
- YooRim Jang
- et al.
- 2025
- SPIE Advanced Lithography 2025
Consideration on segregation behavior of the surface localization material and the pattern roughness degradation in EUV lithography
- KwangMo Choi
- YunJi Kim
- et al.
- 2025
- SPIE Advanced Lithography 2025
Is My Data in Your Retrieval Database? Membership Inference Attacks Against Retrieval Augmented Generation
- Maya Anderson
- Guy Amit
- et al.
- 2025
- ICISSP 2025
Revealing the Origin and Nature of the Buried Metal-Substrate Interface Layer in Ta/Sapphire Superconducting Films
- Aswin k. Anbalagan
- Rebecca Cummings
- et al.
- 2025
- Advanced Science
A Route toward the On-Surface Synthesis of Organic Ferromagnetic Quantum Spin Chains
- Fabian Paschke
- Ricardo Ortiz
- et al.
- 2025
- JACS
The inherent adversarial robustness of analog in-memory computing
- Corey Lammie
- Julian Büchel
- et al.
- 2025
- Nature Communications
Design and Evaluation of an AI-Assisted Grading Tool for Introductory Programming Assignments: An Experience Report
- Goda Nagakalyani
- Saurav Chaudhary
- et al.
- 2025
- SIGCSE 2025
Stochastic ISTA/FISTA Adaptive Step Search Algorithms for Convex Composite Optimization
- Lam M. Nguyen
- Katya Scheinberg
- et al.
- 2025
- Journal of Optimization Theory and Applications