In-situ MBE Si as passivating interlayer on GaAs for HfO2 MOSCAP's: effect of GaAs surface reconstruction
- D.J. Webb
- J. Fompeyrine
- et al.
- 2007
- Microelectronic Engineering
Publications
Date
Featured collections
Popular topics
221 results at Microelectronic Engineering
Recent advances and current challenges in the search for high mobility band-edge high-k/metal gate stacks
- V. Narayanan
- V.K. Paruchuri
- et al.
- 2007
- Microelectronic Engineering
Epitaxial germanium-on-insulator grown on (001) Si
- J.W. Seo
- Ch. Dieker
- et al.
- 2007
- Microelectronic Engineering
Overlay as the key to drive wafer scale 3D integration
- Steven E. Steen
- Douglas LaTulipe
- et al.
- 2007
- Microelectronic Engineering
Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films
- C. Lavoie
- C. Detavernier
- et al.
- 2006
- Microelectronic Engineering
Micron-sized mechanical oscillators created by 3D two-photon polymerization: Towards a mechanical logic device
- A.W. Knoll
- U. Dürig
- et al.
- 2006
- Microelectronic Engineering
Hybrid lithography: The marriage between optical and e-beam lithography. A method to study process integration and device performance for advanced device nodes
- Steven Steen
- Sharee J. McNab
- et al.
- 2006
- Microelectronic Engineering
Integrating nanotechnology into a working storage device
- A.W. Knoll
- P. Bächtold
- et al.
- 2006
- Microelectronic Engineering
Detection of open or closed porosity in low-κ dielectrics by solvent diffusion
- Marcus A. Worsley
- Mark Roberts
- et al.
- 2005
- Microelectronic Engineering
Ramifications of lubrication theory on imprint lithography
- Matthew Colburn
- Byung Jin Choi
- et al.
- 2004
- Microelectronic Engineering