Electrochemistry of Chromium-Metalloid Alloys in Sulfuric Acid—II
- R.R. Ruf
- 2019
- JES
Publications
14338 results for Physical Sciences
The defect mitigation on EUV stack by track based technology
- Naoki Shibata
- Lior Huli
- et al.
- 2019
- SPIE Advanced Lithography 2019
Track based techniques to improve high-resolution EUV patterning defectivity
- Naoki Shibata
- Lior Huli
- et al.
- 2018
- EUVL 2018
Microcavity III-V lasers monolithically grown on silicon
- Benedikt Mayer
- Svenja Mauthe
- et al.
- 2018
- SPIE OPTO 2018
Channel Geometry Impact and Narrow Sheet Effect of Stacked Nanosheet
- Chun Wing Yeung
- Jingyun Zhang
- et al.
- 2018
- IEDM 2018
Electric field assisted placement of carbon nanotubes using sacrificial graphene electrodes
- M. Engel
- D.B. Farmer
- et al.
- 2018
- TechConnect 2018
Monolithically integrated InGaAs microdisk lasers on silicon using template-assisted selective epitaxy
- Svenja Mauthe
- Benedikt Mayer
- et al.
- 2018
- SPIE Photonics Europe 2018
The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD
- Chi-Chun Liu
- Yann Mignot
- et al.
- 2018
- SPIE Advanced Lithography 2018
Coater/developer based techniques to improve high-resolution EUV patterning defectivity
- Koichi Hontake
- Lior Huli
- et al.
- 2017
- SPIE Photomask Technology + EUV Lithography 2017
Overlay statistics for multiple exposure patterning
- 2017
- SPIE Advanced Lithography 2017