193nm single layer photoresists: Defeating tradeoffs with a new class of fluoropolymers
- P.R. Varanasi
- R.W. Kwong
- et al.
- 2005
- Microlithography 2005
Publications
1492 results for Healthcare
Perfluoropolyethers as novel materials for soft lithography
- Jason P. Rolland
- Eric C. Hagberg
- et al.
- 2005
- Microlithography 2005
Silsesquioxane-based 193 nm bilayer resists: Characterization and lithographic evaluation
- Hiroshi Ito
- Hoa D. Truong
- et al.
- 2005
- Microlithography 2005
Studies of acid diffusion in low Ea chemically amplified photoresists
- G.M. Wallraff
- D. Medeiros
- et al.
- 2005
- Microlithography 2005
The IHE-Bus: A practical tool to instrument and simulate IHE deployment
- Uri Shani
- Boaz Carmeli
- et al.
- 2005
- SPIE Medical Imaging 2005
Biological chiral recognition: The substrate's perspective
- Vidyasankar Sundaresan
- Ravinder Abrol
- 2005
- Chirality
An estimator of number of species from quadrat sampling
- Peter J. Haas
- Yushan Liu
- et al.
- 2005
- Biometrics
Enhancing the accuracy of virtual screening: Molecular dynamics with quantum-refined force fields
- Alessandro Curioni
- Tiziana Mordasini
- et al.
- 2005
- J. Comput. Aided Mol. Des.
A recursive un-termination method for nondestructive in situ S-parameter measurement of hermetically encapsulated packages
- Ullrich R. Pfeiffer
- Christian Schuster
- 2005
- IEEE T-MTT
Spatially transient stress effects in thin films by X-ray diffraction
- C.E. Murray
- C.C. Goldsmith
- et al.
- 2005
- Powder Diffraction