Radiometric consistency in source specifications for photolithography
- Alan E. Rosenbluth
- Jaione Tirapu Azpiroz
- et al.
- 2011
- COSI 2011
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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2 results at COSI 2011
Field-of-view extension using code-division-multiple-access technique: Numerical analysis
- Zahra Kavehvash
- Khashayar Mehranya
- et al.
- 2011
- COSI 2011