Characterization of indium tin oxide and al-doped zinc oxide thin films deposited by confocal RF magnetron sputter deposition
- S. Jay Chey
- Wei Liu
- et al.
- 2009
- PVSC 2009
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.