Improving silicon crystallinity by grain reorientation annealing
- K.L. Saenger
- J.P. De Souza
- et al.
- 2009
- MRS Spring Meeting 2009
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5 results at MRS Spring Meeting 2009
Crystallization characteristics of Ge-Sb phase change materials
- Simone Raoux
- Cyril Cabrai Jr.
- et al.
- 2009
- MRS Spring Meeting 2009
The influence of nitrogen doping on the chemical and local bonding environment of amorphous and crystalline Ge2Sb2Te 5
- J.S. Washington
- E. Joseph
- et al.
- 2009
- MRS Spring Meeting 2009
Stress gradients observed in Cu thin films induced by capping layers
- Conal E. Murray
- Paul R. Besser
- et al.
- 2009
- MRS Spring Meeting 2009
Dual damascene reactive ion etch polymer characterization through x-ray photoelectron spectroscopy for 65 nm and 45nm technology nodes
- Samuel S. Choi
- Chet Dziobkowski
- et al.
- 2009
- MRS Spring Meeting 2009