On intermittent-contact mode sensing using electrostatically-actuated micro-cantilevers with integrated thermal sensors
- D.R. Sahoo
- W. Häberle
- et al.
- 2008
- ACC 2008
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.