Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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1 result at Photomask and Next-Generation Lithography Mask Technology 2009

Thorough characterization of a EUV mask
- - Hiroyuki Mizuno
  - Gregory McIntyre
  - et al.
- 2009
- Photomask and Next-Generation Lithography Mask Technology 2009