High resolution profiling using ion scattering and resonant nuclear reactions
- R.P. Pezzi
- R.M. Wallace
- et al.
- 2005
- International Conference on Characterization and Metrology for ULSI Technology 2005
Publications
2 results at International Conference on Characterization and Metrology for ULSI Technology 2005
Cross section and critical dimension metrology in dense high aspect ratio patterns with CD-SAXS
- Ronald L. Jones
- Eric K. Lin
- et al.
- 2005
- International Conference on Characterization and Metrology for ULSI Technology 2005