Cross section and critical dimension metrology in dense high aspect ratio patterns with CD-SAXS
- Ronald L. Jones
- Eric K. Lin
- et al.
- 2005
- International Conference on Characterization and Metrology for ULSI Technology 2005
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2 results at International Conference on Characterization and Metrology for ULSI Technology 2005
High resolution profiling using ion scattering and resonant nuclear reactions
- R.P. Pezzi
- R.M. Wallace
- et al.
- 2005
- International Conference on Characterization and Metrology for ULSI Technology 2005