Simultaneous fabrication of RF MEMS switches and resonators using copper-based CMOS interconnect manufacturing methods
- C.V. Jahnes
- J.M. Cotte
- et al.
- 2004
- MEMS 2004
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3 results at MEMS 2004
High-resolution patterning and transfer of thin PDMS films: FABRICATION of hybrid self-sealing 3D microfluidic systems
- U. Kloter
- H. Schmid
- et al.
- 2004
- MEMS 2004
Ultra-small single-crystal silicon cantilevers for scanning force microscopes
- J.L. Yang
- M. Despont
- et al.
- 2004
- MEMS 2004