Three-dimensional imaging of nano-voids in copper interconnects using incoherent bright field (IBF) tomography
- P.A. Ercius
- D.A. Muller
- et al.
- 2006
- M&M 2006
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5 results at M&M 2006
High resolution EELS in the IBM sub-angstrom STEM
- P.E. Batson
- 2006
- M&M 2006
Imaging at high beam energies in the scanning electron microscope
- L. Gignac
- S.H. Boettcher
- et al.
- 2006
- M&M 2006
Si and Ge nanowire growth mechanisms observed using in situ microscopy
- S. Kodambaka
- J.B. Hannon
- et al.
- 2006
- M&M 2006
The history and future of the SEM - A personal view
- Oliver C. Wells
- 2006
- M&M 2006