5 MHz, 2 N/m piezoresistive cantilevers with INCISIVE tips
- R.P. Ried
- H.J. Mamin
- et al.
- 1997
- TRANSDUCERS 1997
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3 results at TRANSDUCERS 1997
Fabrication of ultrasensitive piezoresistive cantilevers for torque magnetometry
- J. Brugger
- M. Willemin
- et al.
- 1997
- TRANSDUCERS 1997
High-yield wafer chuck for single-sided wet etching of MEMS structures
- J. Brugger
- G. Beljakovic
- et al.
- 1997
- TRANSDUCERS 1997