Projection Micromachining of Polyimide Thin Films by an Excimer LaserX. ZhangC.P. Grigoropouloset al.1996IMECE 1996
NANOJOULE THERMAL TRANSFER IN MICROMECHANICAL HETEROSTRUCTURESRudiger BergerChristoph Gerberet al.1996IMECE 1996