Photoluminescence and photoreflectance scanning of silicon-on-insulator materialsH.J. Hovel1993IEEE International SOI Conference 1993
Material development of SIMOX with a thin boxD.K. SadanaH.J. Hovelet al.1993IEEE International SOI Conference 1993
SOI technology outlook for sub-0.25 μm CMOS, challenges and opportunitiesB. DavariH.J. Hovelet al.1993IEEE International SOI Conference 1993