Dry etching of (Ba,Sr)TiO3 with Cl2, SF6, and CF4
- K.R. Milkove
- 1998
- International Symposium on Integrated Ferroelectrics 1998
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.