Publications

3 results at MRS Fall Meeting 1986

REACTIVE ION ETCHING OF Al(Cu) ALLOYS.
- - C.-K. Hu
  - M.B. Small
  - et al.
- 1986
- MRS Fall Meeting 1986
POST OXIDATION ANNEAL AND RE-OXIDATION EFFECTS IN 5 nm SiO//2 FILMS.
- - L. Dori
  - M. Arienzo
  - et al.
- 1986
- MRS Fall Meeting 1986
REACTIVE ION ETCHING OF MULTI-LAYER RESIST.
- - H.Y. Ng
  - D.P. Klaus
  - et al.
- 1986
- MRS Fall Meeting 1986