Publications

10 results at VLSI Technology 2017

Dual beam laser annealing for contact resistance reduction and its impact on VLSI integrated circuit variability
- - Zuoguang Liu
  - Oleg Gluschenkov
  - et al.
- 2017
- VLSI Technology 2017
Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET
- - N. Loubet
  - T.B. Hook
  - et al.
- 2017
- VLSI Technology 2017
SiGe FinFET for practical logic libraries by mitigating local layout effect
- - G. Tsutsui
  - Huimei Zhou
  - et al.
- 2017
- VLSI Technology 2017
Implementation challenges for scalable neuromorphic computing
- - Shintaro Yamamichi
  - Akihiro Horibe
  - et al.
- 2017
- VLSI Technology 2017
Comparison of key fine-line BEOL metallization schemes for beyond 7 nm node
- - Takeshi Nogami
  - X. Zhang
  - et al.
- 2017
- VLSI Technology 2017
First demonstration of 3D SRAM through 3D monolithic integration of InGaAs n-FinFETs on FDSOI Si CMOS with inter-layer contacts
- - Veeresh Deshpande
  - Herwig Hahn
  - et al.
- 2017
- VLSI Technology 2017
Highly-selective superconformai CVD Ti silicide process enabling area-enhanced contacts for next-generation CMOS architectures
- - Nicolas Breil
  - A. Carr
  - et al.
- 2017
- VLSI Technology 2017
Understanding the interfacial layer formation on strained Si_1-xGe_x channels and their correlation to inversion layer hole mobility
- - Choonghyun Lee
  - Richard G. Southwick
  - et al.
- 2017
- VLSI Technology 2017
High performance and record subthreshold swing demonstration in scaled RMG SiGe FinFETs with high-Ge-content channels formed by 3D condensation and a novel gate stack process
- - Pouya Hashemi
  - Takashi Ando
  - et al.
- 2017
- VLSI Technology 2017
High performance and low leakage current InGaAs-on-silicon FinFETs with 20 nm gate length
- - Xiao Sun
  - Christopher P. D’Emic
  - et al.
- 2017
- VLSI Technology 2017