Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

Date

Start

End

Featured collections

Popular topics

10 results at IITC/AMC 2016

Interconnect performance and scaling strategy at the 5 nm Node
- - James H.-C. Chen
  - N.V. Licausi
  - et al.
- 2016
- IITC/AMC 2016
Experimental study of nanoscale Co damascene BEOL interconnect structures
- - James Kelly
  - James H.-C. Chen
  - et al.
- 2016
- IITC/AMC 2016
Transforming the P4 process to enhance mechanical and fracture properties of ULKs
- - Scott G. Isaacson
  - Wang Can
  - et al.
- 2016
- IITC/AMC 2016
BEOL process integration for the 7 nm technology node
- - T. Standaert
  - Genevieve Beique
  - et al.
- 2016
- IITC/AMC 2016
Post porosity plasma protection integration at 48 nm pitch
- - H. Huang
  - Krystelle Lionti
  - et al.
- 2016
- IITC/AMC 2016
Formation and microstructure of thin Ti silicide films for advanced technologies
- - Praneet Adusumilli
  - A. Carr
  - et al.
- 2016
- IITC/AMC 2016
Ultrathin conformal multilayer SiNO dielectric cap for capacitance reduction in Cu/low k interconnects
- - Deepika Priyadarshini
  - Son Van Nguyen
  - et al.
- 2016
- IITC/AMC 2016
Pre-liner dielectric nitridation for resistance reduction in copper interconnects
- - Chih-Chao Yang
  - Terry A. Spooner
  - et al.
- 2016
- IITC/AMC 2016
Tungsten and cobalt metallization: A material study for MOL local interconnects
- - Vimal Kamineni
  - Mark Raymond
  - et al.
- 2016
- IITC/AMC 2016
Ruthenium interconnect resistivity and reliability at 48 nm pitch
- - Xunyuan Zhang
  - Huai Huang
  - et al.
- 2016
- IITC/AMC 2016