Epi Source/Drain Damage Mitigation with Inner Spacer and Buffer Optimization in Stacked Nanosheet Gate-All-Around Transistors
- Curtis Durfee
- Ivo Otto
- et al.
- 2023
- SSDM 2023
Publications
Date
Featured collections
Popular topics
3 results at SSDM 2023
Photonic and electronic integrated technologies for neuromorphic computing
- Bert J. Offrein
- Tommaso Stecconi
- et al.
- 2023
- SSDM 2023
Vertical-Transport Nanosheet Technology for Scaling beyond the Lateral-Transport Devices CMOS Era
- Hemanth Jagannathan
- Susan Fan
- et al.
- 2023
- SSDM 2023