Gate stacks for silicon, silicon germanium, and III-V channel MOSFETs
- Martin M. Frank
- Yu Zhu
- et al.
- 2014
- ECS Meeting 2014
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4 results at ECS Meeting 2014
Ultrathin (8-14 nm) conformal SiN for sub-20 nm Copper/Low-k Interconnects
- Son Van Nguyen
- Deepika Priyadarshini
- et al.
- 2014
- ECS Meeting 2014
Challenges in contact technologies for planar/non-planar Si technologies
- Praneet Adusumilli
- Emre Alptekin
- et al.
- 2014
- ECS Meeting 2014
Atomic layer deposition of sidewall spacers: Process, equipment and integration challenges in state-of-the-art logic technologies
- Michael Belyansky
- Richard Conti
- et al.
- 2014
- ECS Meeting 2014