Several issues regarding the nanopore structure in low-dielectric-constant films detected by positron annihilation lifetime spectroscopy
- C.L. Wang
- M.H. Weber
- et al.
- 2003
- Radiation Physics and Chemistry
Publications
Date
Featured collections
Popular topics
3 results at Radiation Physics and Chemistry
The role of energy transfer on electron beam exposure of mixtures
- J. Pacansky
- R.J. Waltman
- 1985
- Radiation Physics and Chemistry
Polymer degradation in reactive ion etching and its possible application to all dry processes
- H. Hiraoka
- L.W. Welsh Jr.
- 1981
- Radiation Physics and Chemistry