Plasma modeling of a PEALD system for the deposition of TiO 2 and HfO 2
- Junghoon Joo
- Steve M. Rossnagel
- 2009
- Journal of the Korean Physical Society
Publications
Date
Featured collections
Popular topics
3 results at Journal of the Korean Physical Society
Generation of 193-nm femtosecond light pulses and their application to photomask repair
- D. Lim
- R. Haight
- 2007
- Journal of the Korean Physical Society
Admittance spectroscopy of Mg-doped GaN grown by molecular beam epitaxy using RF nitrogen sources
- D.J. Kim
- D.Y. Ryu
- et al.
- 1999
- Journal of the Korean Physical Society