Selective plating of nickel ceramic composite films for MEMS applications
- K.S. Teh
- Y.T. Cheng
- et al.
- 2002
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
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4 results at Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Dynamic response and shock resistance of ferromagnetic micromechanical magnetometers
- Jeffrey K. Yee
- Henry H. Yang
- et al.
- 2002
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
SU-8 based piezoresistive mechanical sensor
- J. Thaysen
- A.D. Yalçinkaya
- et al.
- 2002
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Integrated microheaters for in-situ flying-height control of sliders used in hard-disk drives
- P. Mächtle
- R. Berger
- et al.
- 2001
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)