Conference paper
Full wafer technology for semiconductor lasers
P. Buchmann, M. Benedict, et al.
LEOS 1990
We report on the first voltage measurements of signals with rise times below 20 ps by photoemission sampling based on the single-photon process. The high time and voltage resolution together with the potential of a submicrometre spatial resolution enables testing of very high-speed VLSI circuits by this newly developed method. © 1987, The Institution of Electrical Engineers. All rights reserved.
P. Buchmann, M. Benedict, et al.
LEOS 1990
R. Clauberg, K.H. Frank, et al.
Surface Science
R. Clauberg, A. Blacha, et al.
Review of Scientific Instruments
H. Beha, H.K. Seitz, et al.
Microelectronic Engineering