M. Hargrove, S.W. Crowder, et al.
IEDM 1998
No abstract available.
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010