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Physical Review B
The first sub-100nm technology that allows the monolithic integration of optical modulators and germanium photodetectors as features into a current 90nm base highperformance logic technology node is demonstrated. The resulting 90nm CMOS-integrated Nano-Photonics technology node is optimized for analog functionality to yield power-efficient single-die multichannel wavelength-mulitplexed 25Gbps transceivers. © 2012 IEEE.
R.W. Gammon, E. Courtens, et al.
Physical Review B
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Physical Review B - CMMP
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Physica B: Physics of Condensed Matter
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SPIE Advanced Lithography 2007