A comparison of grain size measurements in Al-Cu thin films: Imaging verses diffraction techniques

Paper

01 Aug 2002

Abstract

No abstract available.

Paper

E.G. Colgan, K.P. Rodbell, et al.

Journal of Applied Physics

Review

J.M.E. Harper, K.P. Rodbell

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Conference paper

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SPIE Advanced Lithography 2013

Conference paper

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MRS Spring Meeting 1999