A computer calculation of step coverage in SiO thin films

Paper

12 Mar 1982

Abstract

No abstract available.

Conference paper

L.K. Wang, A. Acovic, et al.

MRS Spring Meeting 1993

Conference paper

A. Gupta, R. Gross, et al.

SPIE Advances in Semiconductors and Superconductors 1990

Paper

R.W. Gammon, E. Courtens, et al.

Physical Review B

Review

David B. Mitzi

Journal of Materials Chemistry