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Single and dual wavelength exposure of photoresist
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Proceedings of SPIE 1989
In this paper we prove the Lefschetz fixed point formulas of Atiyah, Singer, Segal, and Bott for isometries by using the direct geometric method initiated by Patodi. © 1992 American Mathematical Society.
J. LaRue, C. Ting
Proceedings of SPIE 1989
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