Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Thomas R. Puzak, A. Hartstein, et al.
CF 2007
M.F. Cowlishaw
IBM Systems Journal
B.K. Boguraev, Mary S. Neff
HICSS 2000