E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
A scanning electron microscope with polarization analysis has been built using an Auger microprobe and a Mott analyser. The instrument uses a high brightness field emission source and has an analytical spatial resolution of <100nm. The instrument has a novel geometry, with the electron gun, energy analyser, and Mott analyser coaxial on a axis normal to the the sample surface. The detection plane of the Mott analyser is parallel to the in-plane magnetization of the sample surface. Spin polarized micrographs of domains at the surface of a Fe-4%Si single crystal show that, even at low magnifications, the scan related asymmetries are minor, and the interpretation of the signal contrast is straightforward. © 1990.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
J.V. Harzer, B. Hillebrands, et al.
Journal of Magnetism and Magnetic Materials
Michiel Sprik
Journal of Physics Condensed Matter