William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A scanning electron microscope with polarization analysis has been built using an Auger microprobe and a Mott analyser. The instrument uses a high brightness field emission source and has an analytical spatial resolution of <100nm. The instrument has a novel geometry, with the electron gun, energy analyser, and Mott analyser coaxial on a axis normal to the the sample surface. The detection plane of the Mott analyser is parallel to the in-plane magnetization of the sample surface. Spin polarized micrographs of domains at the surface of a Fe-4%Si single crystal show that, even at low magnifications, the scan related asymmetries are minor, and the interpretation of the signal contrast is straightforward. © 1990.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
J.H. Stathis, R. Bolam, et al.
INFOS 2005
A. Reisman, M. Berkenblit, et al.
JES
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997