Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This study compares the performance of linear and quadratic tetrahedral elements and hexahedral elements in various structural problems. The problems selected demonstrate different types of behavior, namely, bending, shear, torsional and axial deformations. It was observed that the results obtained with quadratic tetrahedral elements and hexahedral elements were equivalent in terms of both accuracy and CPU time. © 1992.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Igor Devetak, Andreas Winter
ISIT 2003
Shu Tezuka
WSC 1991
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989