A proposal for a conveyance system with parallel cooperative micro modules

This paper proposes a conveyance system based on the concept of distributed micro motion systems(DMMS) fabricated by IC-compatible micromachining processes. The DMMS is composed of many smart modules which have microsensors, microactuators and controllers. The key idea is to coordinate simple motions of microactuators in order to carry an object. A two-degree-of-freedom positioner is discussed. The fabrication of two types of microactuators for the positioner, one is a thermally driven cantilever and the other is an electrostatic microactuator, are also described.