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Tomotake Furuhata- Hiroyuki Fujita
- Satoshi Konishi
- et al.
- 1992
- ETFA 1992
- T. Furuhata
- T. Hirano
- et al.
- 1991
- MEMS 1991
- T. Hirano
- T. Furuhata
- et al.
- 1995
- IEICE Transactions on Electronics
- Toshiki Hirano
- Dai Kobayashi
- et al.
- 1994
- Japanese Journal of Applied Physics
- Toshiki Hirano
- Tomotake Furuhata
- et al.
- 1992
- JMEMS