Dry-released nickel micromotors with low-friction bearing structure
- T. Hirano
- T. Furuhata
- et al.
- 1995
- IEICE Transactions on Electronics
Publications
5 results for Tomotake Furuhata
Electroplated and dry-released metallic microstructures for a lateral tunneling unit application
- Toshiki Hirano
- Dai Kobayashi
- et al.
- 1994
- Japanese Journal of Applied Physics
A proposal for a conveyance system with parallel cooperative micro modules
- Hiroyuki Fujita
- Satoshi Konishi
- et al.
- 1992
- ETFA 1992
Design, fabrication, and operation of submicron gap comb-drive microactuators
- Toshiki Hirano
- Tomotake Furuhata
- et al.
- 1992
- JMEMS
Sub-micron gaps without sub-micron etching
- T. Furuhata
- T. Hirano
- et al.
- 1991
- MEMS 1991